Research Academics  
 
   
MEMS Devices
 
Many years of experience in the field of semiconductor and sensor technlogy make us
the ideal partner for your MEMS demands. We provide the know-how and technology
for device development, prototyping, testing and low volume production.
We offer :

- Piezoresistive Pressure Sensors (P= 3mbar - 100bar)
- AeroMEMS
- High Temperature Sensors based on SiC
- High Temperature Sensors based on SOI
- Micro Mirrors
- Micro Actuators (Print Heads, Micro Motors, Micro Shutters)
- Flow Sensors
- Accelerometers
- Micro Hotplates
- Chemical Sensors for Gas Detection
- Micro Relays
- and many more . . .

Contact Person:

  Prof. Dr.-Ing. H.-D. Ngo


Phone: +49 30 314 72 522
Fax: +49 30 314 72 603
E-Mail: ngo@mat.ee.tu-berlin.de