Research and Development at MAT

	Welcome to Research & Development at MAT Please click on the project title for an extended abstract.

	Device Development
	- Silizium-Kraftsensor für extrem hohen Druckbereich - Metallisierungssysteme für Hochtemperatur-Anwendungen - An Electromagnetically Actuated bi-stable Optical Microswitch - SiC based pressure sensor - High Temperature SiC Micro Hotplates for Gas Sensors - 2D-Arrays of MEMS Surface Hotwires for Measurement of Wall-Shear- Stress measurement in turbulent flows - MEMS Surface Fence Probe for Wall Shear Stress Measurements - Micro Coil with Movable Core for Inductive Displacement Sensors - Micromachined Continuous Ink Jet Print Head for High Res.Printing - High Temperature Pressure Sensor for Combustion Engines - Two Axis Micromachined Accelerometer for Gesture Recognition - Basic Modules for Chemical Sensors - A Fast Switching Surface Micromachined Electrostatic Relay - Standard Piezoresistive Pressure Sensors for Automotive Applications

	Technology
	- Silicon Fusion Bonding - High Precision V-Groove Etching in (100) Silicon - Deep Reactive Ion Etching (Bosch Process) - Corner rounding to strengthen silicon sensors - Notch-free structuring of SOI-Materials

	Characterization
	- Elastic Properties of Thin 3C-SiC Films - Fatigue Testing of Polysilicon for MEMS Applications - Long-term stability of Piezoresistive Pressure Sensors