Research Academics  
 
   
 
2015
 

Käppler, Andrea; Windrich, Frank; Löder, Martin G. J.; Malanin, Mikhail; Fischer, Dieter; Labrenz, Matthias; Klaus-Jochen Eichhorn; Voit, Brigitte
Identification of microplastics by FTIR and Raman microscopy: a novel silicon filter substrate opens the important spectral range below 1300 cm-1 for FTIR transmission measurements Analytical and Bioanalytical Chemistry 
pp. 6791-6801, ISSN 1618-2642 , Berlin, Springer Berlin Heidelberg, 2015

Wöhrmann, Markus; Wilke, Martin;Gernhardt, Robert; Zoschke, Kai; Fritzsch, Thomas; Neitz, Marcel; Schroeder, Henning
Metallization of TGVs and RDL generation of a high density glass interposer 
Global Interposer Technology (GIT) Workshop, Atlanta, USA, 4.11.-7.11.2015 , 2015

Zoschke, Kai; Manier, Charles- Alix; Wilke, Martin; Oppermann, Hermann; Ruffieux, D.; Dekker, J.; Jaakkola, A.; Dalla Piazza, S.; Allegato, G.; Lang, Klaus-Dieter 
Application of TSV Integration and Wafer Bonding Technologies for Hermetic Wafer Level Packaging of MEMS Components for Miniaturized Timing Devices 
ECTC, San Diego, USA, 26.-29.5.2015 , 2015

Ngo, Ha-Duong; Biswaijit, Mukhopadhyay; Oswin, Ehrmann; Klaus-Dieter Lang 
Advanced Liquid-Free, Piezoresistive, SOI-Based Pressure Sensors for Measurements in Harsh Environments 
Sensor 2015, ISSN IISSN 14248220 , Switzerland, MDPI, 2015

Ngo, Ha-Duong; V.,Bellido-Gonzalez; D.,Monaghan; B.,Daniel; H., Li; F., Papa,; K., Kroehnert; O.,Ehrmann; Klaus-Dieter, Lang; P., Mackowiak 
Plasma Enhanced Atomic Layer Deposition by means of an Anode Layer Ion Source for Electronics Packaging Applications 
Singapore, Singapore, December 2015 , 2015

Ngo, Ha-Duong; V., Bellido-Gonzalez; F., Papa; A., Azzopardi; J., Brindley; H., Li; A., Vetushka; K., Kroehnert; O., Ehrmann2,3, K-D. Lang2,3, P. Mackowiak3, I. Fernandez; A., Wennberg 
HIPIMS in Full Face Erosion Circular Cathode for Semiconductor Applications 
EPTC, Singapore, 02.-04. December 2015 , 2015

Ngo, Ha-Duong; Danie, Yushkanov; Prashanth, Makaram; Gokul, Ramakrishnan; Olaf, Pohl 
PORTABLE ACETONE MONITORING SYSTEM FOR WELLNESS APPLICATIONS 
ISOENInternational Symposium on Olfaction and Electronic Noses, July 2015 , France, 2015

Brink, Morten; Grams,Arian; Eichhammer, Yann; Broll, M.; Fritzsch, Thomas; Lang, Klaus-Dieter 
Investigation of room-temperature flip chip connections 
SmartSystemsIntegration, Kopenhagen, Denmark, 11.3.-12.3.2015 , 2015

Zoschke, Kai; Lang, Klaus-Dieter 
Technologies for Wafer Level MEMS Capping based on Permanent and Temporary Wafer Bonding 
International Conference on Device Packaging, Fountain Hills, USA, 17.03.-19.03.2015 , 2015

Wöhrmann, Markus; Fischer, Thorsten; Walter, Hans; Töpper, Michael; Lang, Klaus-Dieter 
Next Generation Thin Film Polymers for WLP Applications and their Mechanical and Electrical Characterization 
International Conference on Device Packaging, Fountain Hills, USA, 17.03.-19.03.2015 , 2015

Manier, Charles-Alix; Zoschke, Kai; Oppermann, Hermann; Ruffieux, D.; Dalla PIazza, S.; Suni, T.; Dekker, J.; Allegato, G. 
Wafer level packaging for hermetical encapsulation of MEMS resonators 
DTIP - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Montpellier, France, 27.4.-30.4.2015 , 2015

Ngo, Ha-Duong; Piotr, Mackowiak; Fabian, Meinecke; Biswajit, Mukhopadhyay; Thanh Hai, Hoang; Quoc-Cuong. Dao; Oswin, Ehrmann; Klaus-Dieter, Lang  
Investigation of DRIE etching performance on signal quality of a SOI based pressure sensors for harsh environments 
Sensor Nürnberg, Nürnberg , 2015