Research Academics  
 
   
 
2013
 

B. Mukhopadhyay, M. Fritz, P. Mackowiak, T. C. Vu, O. Ehrmann, K.-D. Lang, H.-D. Ngo
MEMS pressure sensor with maximum performances by using novel back-side-direct-exposure concept featuring through glass vias
SPIE Conference on MEMS. Grenoble, 2013

 

X., Xu, P. Mackowiak, T. C. Vu, O. Ehrmann, K.-D. Lang, H.-D. Ngo 
Thermal design of a tristable electromagnetic linear microactuator with high displacement and low actuation force for mass storage applications 
Conference, Apr. 2013, Grenoble, 2013

 

K. Hoeppner, M. Ferch, M. Eisenreich, K. Marquardt, R. Hahn, M. Mukhopadhyay, P. Mackoqiak, R. Gernhardt, M. Töpper, Ha-Duong Ngo  
Design, fabrication and testing of silicon-integrated Li-ion secondary micro baterie with side-by-side electrodes

Conference paper, PowerMEMS, December, 2013, UK.

B. Mukhopadhyay, M. Fritz, P. Mackowiak, T. C. Vu, O. Ehrmann, K.-D. Lang, H.-D. Ngo
An advanced MEMS Sensor packaging concept for use in harsh environments;

ECTC Conference, Singapore, December, 2013.