Research Academics  
 
   
 
2011
 

Willyanto Kurniawan 
Mikromechanik und Aufbautechnik zur Realisierung eines MEMS Aktuators für Festplattenspeicher-Schreib/Leseköpfe
Dissertation

Tolga Tekin, Ha-Duong Ngo,  Klaus Dieter Lang
Packaging of MEMS/MOEMS and nanodevices: reliability, testing, and characterization ascpects
SPIE Photonics West 2011. Invited paper. San Francisco, California, USA.

Xu Xin 
Entwurf und Realisierung eines elektromagnetischen 3-Positionen MEMS Aktuators
Dissertation

Ha-Duong Ngo,  Oliver Pabst, Tolga Tekin, Michael Schiffer, Ernst Obermeier, Klaus Dieter Lang
Measurement of Young's modulus and residual stress of thin SiC layers for MEMS high temperature applications
SPIE Microtechnologies Conference, 18-20 April, 2011, Prague, Czech Republic.

Ha-Duong Ngo,  V. C. Thanh, M. Fritz, W. Kurniawan, T. Tekin, T. Mukhopadhyay, M. Schiffer, A. Kolitsch, K.-D. Lang.
MEMS sensor with giant piezoresistive effect using metall-semiconductor hybrid structure
Transducers'11. Conference on Solid-State Sensors, Actuators and Microsystems. June 5-9, 2011, Beijing, China.
 
O. Gii de Villasante, Z. Wang, A. Suna, P. Tcheg, B. Wang, S. Lutzmann, C. Baumann, Y. Kesmis, M. Sakalas, B. Dondjio, H.-D. Ngo, T. Tekin.
Design and Simulation of Optical Interfaces for Photonics Integrated System-in-Package
IX. ITG-Workshop Silicon Photonics, 11. Mai, 2011, Nürnberg.