Research Academics  
 
   
 
2008
 

U.Buder, R.Petz, M.Kittel, W.Nitsche, E. Obermeier
AeroMEMS Polyimide Based Wall Double Hot-Wire Sensor for Flow Seperation Detection
Sensors & Actuators A: Physical
Volume 142/1, March 2008, pp. 130-137
[abstract]

A. Berns, U. Buder, E. Obermeier, A. Wolter, A. Leder
Application of AeroMEMS Surface Pressure Sensor Arrays in Experimental Fluid Mechanics
46th AIAA Aerospace Sciences Meetings and Exhibit
January 7-10, 2008, Reno, NV
AIAA-2008-0271

[abstract]
 

A. Berns, H.-D. Ngo, U. Buder, E. Obermeier
AeroMEMS Pressure sensor Array Featuring Through-Wafer Vias for High-Resolution Wall Pressure Measurements
Proceedings of the 21st IEEE International Conference on Micro Electro Mechanical Systems,
January 13-17, Tucson, AZ, 2008, pp. 896899
[abstract]
 
 A. Berns, U. Buder, X. H. Wang, W.Nitsche, E. Obermeier
AeroMEMS pressure sensor with integrated wall hot-wire
Conference IEEE Sensors 2008, Proceedings
October 26-29, 2008, Lecce, Italy
Paper ID C5L-B1
[abstract]
 
H.-D. Ngo, A.-T. Tham, M. Simon, E. Obermeier
Corner Rounding to Strenghthen Silicon Pressure Sensors Using DRIE
Conference IEEE Sensors 2008, Proceedings
October 26-29, 2008, Lecce, Italy
Paper ID C5L-B5
[abstract]