Research Academics  
 
   
 
2006
 


U. Buder, J.-P. von Klitzing, R.Petz, W.Nitsche, E. Obermeier
A Family of Micromachined Wall Hot-Wire Sensors on Polyimide Foil for Measurement on Aerodynamic Surfaces
44th AIAA Aerospace Sciences Meetings and Exhibit, January 9 - 12, 2006, Reno, NV, U.S.A., Proceedings, AIAA 2006-1244
[abstract]

M.Schiffer, E. Obermeier, F.Grewe, A.Ebner, H.H.Fernholz
AeroMEMS Surface Fence for Wall Shear Stress Measurements in Turbulent Flows
44th AIAA Aerospace Sciences Meetings and Exhibit, January 9 - 12, 2006, Reno, NV, U.S.A.,Proceedings
[abstract]

U. Buder, J.-P. von Klitzing,  E. Obermeier
Reactive Ion Etching for Bulk Structuring of Polyimide
Sensors & Actuators A: Physical, Volume 132/1, November 2006, pp. 393 - 399
[abstract]

A. Berns, U. Buder, E. Obermeier, A. Wolter, A. Leder
AeroMEMS Sensor Array for High- Resolution Wall Pressure Measurements
Sensors & Actuators A: Physical, Volume 132/1, November 2006, pp. 104 - 111
[abstract]
Wei-Hsu Chang; Schellin, B.; Obermeier, E.; Yu-Chung Huang;
Electrochemical etching of n-type 6H-SiC without UV illumination
Journal of Micro-Electromechanical systems
Volume 15,  Issue 3,  June 2006 Page(s):548 - 552
 
U. Buder, P. Ninz, L. Henning, R. King, E. Obermeier;
Thermal Cross Talk in MEMS Linear Arrays of Wall Hot-Wires Analyzed by Means of Simulation and Experiment
25th Aerodynamic Measurement Technology and Ground Testing Conference, June 5 - 8, 2006, San Francisco, CA, U.S.A., Proceedings, AIAA 2006-3635
 

U. Buder, R. Petz, W. Nitsche, E. Obermeier;
AeroMEMS Wall Double Hot-Wire Sensor on Flexible Substrate
Proceedings of the 20th Eurosensors, Göteborg, Sweden, 17th – 20th September 2006, Paper M2A-O2, ISBN 91-631-9280-2

W. Kurniawan, K. Dixit Shantanu, M. Schiffer, B. Mukhopadhyay, U. Buder, E. Obermeier;
Fabrication of Sub-mm2 Piezoresisitve Pressure Sensors Based on SOI and DSE
Proceedings of the 20th Eurosensors, Göteborg, Sweden, 17th – 20th September 2006, Paper M2B-P22, ISBN 91-631-9280-2

A. Schleunitz, H. Steffes, R. Chabicovsky, K. Piglmayer, E. Obermeier;
Optical Gas Sensitivity of a Metaloxide Multilayer Ssystem with Gold-Nano-Clusters
Proceedings of the 20th Eurosensors, Göteborg, Sweden, 17th – 20th September 2006, Paper T3A-O2, ISBN 91-631-9280-2
  Gerd Wieczorek, Ha-Duong Ngo, Ernst Obermeier, Giorgio Fagnani, Kenneth M. Robb;
Micromachining of Bulk SiC Using Dry Etching and Ultrasonic Drilling
Proceedings of the 20th Eurosensors, Göteborg, Sweden, 17th – 20th September 2006, Paper M2B-P22, ISBN 91-631-9280-2
 
U.Buder, A.Berns, E.Obermeier, R.Petz, W.Nitsche;
AeroMEMS Wall Hot-Wire Anemometer on Polyimide Foil for Measurement of High
Frequency
Fluctuations on Curved Surfaces
4th IEEE Conference on Sensors, October 31- November 3, Irvine, CA, USA, Proceedings, ISBN: 0-7803-9057-1, pp. 545-548
H.-D. Ngo et al.;  
Plasma Etching of Tapered Features in Silicon for MEMS and Wafer Level Packaging Applications 
iMEMS conference proceeding, Singapore 2006, pp. 271-276
H.-D. Ngo et al.;  
New low temperature silane-based PECVD oxide for MEMS and Wafer Level Packaging Applications
APCOT conference proceeding, Singapore 2006