Research Academics  
 
   
 
2005
 

U. Buder, J.-P. von Klitzing, and E. Obermeier
Bulk Micromachining of Polyimide for AeroMEMS Flowsensors using Reactive Ion Etching
Proceedings of the 19th Eurosensors, Barcelona, Spain, 11th – 14th September 2005, MC11

[abstract]

M.Schiffer, E. Obermeier, F.Grewe, A.Ebner, H.H.Fernholz
A New Height-Adjustable AeroMEMS Surface Fence Probe Fabricated in SOI Technology for High Resolution Wall Shear Stress Measurements in Turbulent Flows
TRANSDUCERS'05 Conference Proceedings, Seoul 2005
[abstract]

H.Steffes, A.Schleunitz, U.Gernert, R.Chabicovsky, E.Obermeier
A noval optical gas sensor based on sputtered InxOyNz films with gol-nano-dots
Micro- and Nano-Engineering 2005, Conference Proceedings
[abstract]

G. Müller, J. Schalwig, P. Kreisl, A. Helwig, E.Obermeier, O.Weidemann, M.Stutzmann, M.Eickhoff
High-temperature operated field-effect gas sensors
Encyclopadia of Sensors 2004
 
A.Berns, R.v.Metzen, B.Mukhopadhyay, E. Obermeier, A.Wolter, A.Leder
Ultra Sensitive AeroMEMS sensor Array for High- Resolution Wall Pressure Measurements
Proceedings of the 19th Eurosensors, Barcelona, Spain, 11th – 14th September 2005,
MB07
 
P.Kreisl, A.Helwig, A.Friedberger, G.Mueller, E. Obermeier, S.Sotier
Detection of Hydrocarbon Species Using Silicon MOS Capacitors Operated in a non-stationary Temperature Pulse Mode
Sensors and Actuators B (Chemical), vol.106, no.2, p. 489-97
[abstract]
U. Buder, A.Berns, J.-P. von Klitzing, R.Petz, W.Nitsche, E. Obermeier
AEROMEMS Wall Hot-Wire Anemometer on Polyimide Foil for Measurement of High Frequency Fluctuations on Curved Surfaces
4th IEEE Conference on Sensors, October 31 - November 3, 2005, Irvine, CA, U.S.A., Proceedings
[abstract]