Research Academics  

Masanori Ando, Harald Steffes, Rupert Chabicovsky, Masatake Haruta,
Guenther Stangl

Optical and Electrical H2- and NO2-Sensing Properties of Au/InxOyNz Films
IEEE Sensors Journal, Vol. 04, No. 2, April 2004


M. Schober, E. Obermeier, S. Pirskawetz, H.-H. Fernholz
A MEMS skin-friction sensor for time resolved measurements in separated flows
Journal Experiments in Fluids
, Vol. 36, no.4, pp.593-599

T. von Papen, E. Obermeier, M. Schober, H.H. Fernholz
The MEMS surface fence sensor - a new tool for monitoring flow separation and flow reversal
Smart Materials and Structures, IOP (submitted for publication)

Tilmann von Papen, Ulrich Buder, Ha Duong Ngo, Ernst Obermeier
A second generation MEMS surface fence sensor for high resolution wall shear stress measurement
Sensors and Actuators A: Physical, Volume 113/2, July 2004, pp. 151-155
G.Wiche, A.Berns, H.Steffes, E. Obermeier
Thermal analysis of silicon carbide based micro hotplates for metal oxide gas sensors
Eurosensors 2004 (accepted for publication)
Ulrich Buder, Andreas Berns, Ernst Obermeier
Bulk Micromachining of Polyimide Foil by Reactive Ion Etching for the Reduction
of Thermal Losses in MEMS Hot-Wire Anemometers
15 th MicroMechanics Europe Workshop (MME), Leuven, Belgium, 2004
Proceedings, ISBN: 90-5682-535-6, pp.139-142