Research Academics  
 
   
 
2003
 

H. Steffes, E. Obermeier
InxOyNz films with a Ta2O5 promoter for the detection of CO, H2, and CH4
Sensors and Actuators, B 95, 2003, pp. 252 - 257
[abstract]

Gatzen,H.H., Obermeier, E., Kohlmeier, T., Budde, T., Ngo, H.D., Mukhopadhyay, B. Farr
An electromagnetically actuated bi-stable MEMS optical microswitch
TRANSDUCERS'03 Conference Proceedings, Boston 2003

E.Obermeier
Processes for the Fabrication of Three Dimensional MEMS
J.Valldorf, W.Gessner: "Advanced Microsystems for Automotive Applications 2003",
ISBN 3540-005978, Springer Verlag 2003
[abstract]

 
L.Tomasi, E.Wieser, E.Baruah, D.Collomb, F.Jolly, E.Obermeier
Develompent of a new Piezoelectric Dynamic Pressure Generator for High Pressure
Periodic and Aperiodic Calibration
XVII IMEKO World Congress 2003,
 
E.Thielicke, E.Obermeier
A Fast Switching Surface Micromachined Electrostatic Relay
TRANSDUCERS'03 in Boston, Conference Proceedings, pp.899, 2003
 
J.von Berg, M.Gnielka, Ch.Sonderegger, G.Knaden, C.Cavalloni, B.Mukhopadhyay, E.Obermeier
Piezoresistive Low-Pressure Sensor for Harsh Environment Applications
11th International Sensor 2003, Nuremberg, pp. 219-224
 
F.Solzbacher, T.Doll, E.Obermeier
A Comprehensive Analytical and Numerical Analysis of Transient and Static Micro
Hotplate Characteristics
TRANSDUCERS'03 in Boston, Conference Proceedings, pp.1856, 2003