Research Academics  
 
   
 
2002
 

L. Tomasi, G. Krötz, E. Wieser, W. Südkamp, P. Thiele, E. Obermeier
Design of a new concept pressure sensor for X-by-Wire automotive applications
Advanced Microsystems for Automotive Applications (AMAA); Yearbook 2002 Springer, 2002, ISBN 3-540-43232-9, AMAA 2002 Conference (2002)
[abstract]

T. von Papen, H.D. Ngo, H. Steffes, E. Obermeier
A Micromachined surface fence sensor for the measurement of wall shear stress in aerodynamics research
International Conference 'Sensors and Systems Saint-Petersburg, Russia (2002)
Proceedings, Vol. I, pp. 92-96.
[abstract]
T. von Papen, U. Buder, H.D. Ngo, E. Obermeier
High resolution wall shear stress measurement using a MEMS surface fence sensor
Eurosensors XVI, September 15-18, 2002, Prague, Czech Republic,
Proceedings, pp. 744-747.
[abstract]
Wei-Hsu Chang, Bernt Schellin, Rolf Spellmeyer, Ernst Obermeier
Bulk Micromachining of n-type 6H-SiC without UV Illumination for Pressure Sensor Applications
Eurosensors XVI, September 15-18, 2002, Prague, Czech Republic,
Proceedings, pp. 246.
[abstract]
T. von Papen, H. Steffes, H.D. Ngo, E. Obermeier
A micro surface fence probe for the application in flow reversal areas
Sensors and Actuators, A 97-98, 2002, pp. 264-270.
[abstract]
E. Thielicke, E. Obermeier
New MOEMS-Switch Device with Electrostatic Actuator
IEEE/LEOS Optical MEMS 2002, Lugano, Switzerland, 20-23 August, 2002
Conference Digest, p. 159-160.
[abstract]
M. Schiffer, V. Laible, E. Obermeier
Design and Fabrication of 2D Lorentz Force Actuated Micromirrors
IEEE/LEOS Optical MEMS 2002, Lugano, Switzerland, 20-23 August, 2002
Conference Digest, p. 163-164.
[abstract]

Masanori Ando, Harald Steffes, Rupert Chabicovsky, Masatake Haruta,
G. Stangl

Optical and Electrical Gas Sensing Properties of InxOyNz Films
IEEE Sensors 2002, 12-14 June, 2002, Orlando, Florida, U.S.A.,
Proceedings of IEEE, Vol. 1, pp. 623 -626.
[abstract]

H. Steffes, C. Imawan, E. Obermeier
InxOyNz films with a Ta2O5 promoter for the detection of CH4 and H2
Eurosensors XVI, September 15-18, 2002, Prague, Czech Republic,
Proceedings, pp. 458-461.
[abstract]
H. Steffes
Development and optimization of In2O3-based thin films for the detection of NO2
and O3

PhD thesis, Technical University Berlin, Germany,
published by 'Pro Business digital printing GmbH', Berlin, Oktober 2002,
ISBN: 3-934529-85-2.
[abstract]