Research Academics  
 
   
 
2000
 
H. Schröder
Model of the anisotropic etching of single crystal silicon in aqueous KOH solutions
PhD thesis, Technical University Berlin, Germany, published by 'Mensch und Buch Verlag', Berlin, January 2000, ISBN: 3-89820-082-5.
[abstract]
A. Horn, H. Schröder, E. Obermeier, G. Wachutka
Simulation of Orientation-Dependent Etching of Silicon Using a New Step Flow Model of 3D Structuring
Proc. of 3rd Int. Conf. on Modeling and Simulation of Microsystems,Sensors and Actuators (MSM 2000); San Diego, CA, USA, 2000, pp. 63-66
[abstract]
H. Schröder, E. Obermeier
The step flow model for 3D structuring of Si{100} in pure and IPA-containing KOH solutions 
2nd Workshop on Physical Chemistry of Wet Chemical Etching of Silicon,
May 15-16 (2000), Toulouse, France, Technical Digest
[abstract]
H. Steffes, C. Imawan, F. Solzbacher, E. Obermeier
Fabrication parameters and NO2 sensitivity of reactively RF-sputtered In2O3 thin films
Sensors and Actuators, B 68, 2000, pp. 249 - 253
[abstract]
H. Steffes, C. Imawan, F. Solzbacher, E. Obermeier
Ti and Au surface modifications of In2O3 thin films for NO2 sensing
Eurosensors XIV, August 27-30, 2000, Copenhagen, Denmark,
Proceedings, pp. 141-144
[abstract]
H. Steffes, P. Fricke, R. Schneider, C. Imawan, F. Solzbacher, E. Obermeier
New gas sensitive thin films based on In2O3
Presented at IMCS 2000, July 2-5, 2000, Basel, Switzerland
[abstract]
F. Solzbacher, C. Imawan, H. Steffes, E. Obermeier
A new SiC/HfB2 based low power NO2-sensor
Presented at IMCS 2000, July 2-5, 2000, Basel, Switzerland
[abstract]
F. Solzbacher, C. Imawan, H. Steffes, E. Obermeier
A highly stable SiC based micro hotplate NO2 gas sensor
Eurosensors XIV, August 27-30, 2000, Copenhagen, Denmark,
Proceedings, pp. 931-932
[abstract]
F. Solzbacher, C. Imawan, H. Steffes, E. Obermeier, H. Möller
A modular system of SiC-based microhotplates for the application in metal oxide gas sensors
Sensors and Actuators, B 64, 2000, pp. 95 - 101
[abstract]
C. Imawan, F. Solzbacher, H. Steffes, E. Obermeier
Gas sensing characteristics of modified MoO3 thin films using Ti-overlayers for NH3 gas sensors
Sensors & Actuators B 64, 2000, pp. 193 - 197.
[abstract]
C. Imawan, F. Solzbacher, H. Steffes, E. Obermeier
TiOx-modified NiO thin films for H2 gas sensors: Effects of TiOx-overlayer sputtering parameters
Sensors & Actuators B 68, 2000, pp. 184 - 188
[abstract]
C. Imawan, H. Steffes, F. Solzbacher, E. Obermeier
Sputtered MoO3 multilayer thin films for H2 detection
Eurosensors XIV, August 27-30, 2000, Copenhagen, Denmark, Proceedings, pp. 155 - 158
[abstract]
C. Imawan, H. Steffes, F. Solzbacher, E. Obermeier
Sputtered V/MoO3 thin films for highly sensitive and selective H2 detection
Presented at IMCS 2000, July 2-5, 2000, Basel, Switzerland
[abstract]
S. Zappe, J. Franklin, E. Obermeier, M. Eickhoff, H. Möller, G. Krötz, C. Rougeot
High Temperature 10 Bar Pressure Sensor based on 3C-SiC/SOI for Turbine Control Applications
Conf. Proc. ECSCRM 2000, Kloster Banz, Germany, pp. , 2000
[abstract]
S. Zappe, E. Obermeier, J. Stoemenos, G. Krötz, W. Skorupa, D. Panknin
Altering the TCR of 3C-SiC-on-SOI films by Amorphization by Ion Implantation of Silicon
published at HITEC 2000 conference, Albuquerque, NM, USA, 2000
[abstract]
 S. Zappe, E. Obermeier, M. Eickhoff, H. Möller, G. Krötz, E. Bonnotte, Y. Barriol, J.L. Decorps, C. Rougeot, O. Lefort, J. Stoemenos
Piezoresistive High Pressure Sensor Based on 3C-SiC-on-SOI for Oil Well Logging Applications
published at HITEC 2000 conference, Albuquerque, NM, USA, 2000
[abstract]
E. Thielicke, E. Obermeier
Microactuators and their technologies
Mechatronics 10, 2000, pp. 431 - 455
[abstract]