Research Academics  
 
   
 
1999
 

F. Solzbacher, D. Mutschall, E. Obermeier
Au-Modified NiO Thinfilms for Applications in H2S-Gassensors
Sensor '99 - 9th Int'l Trade Fair and Conference for Sensors / Transducers & Systems, Nürnberg, Germany, May 18-20, 1999.
Sensor '99 Proceedings I, 1999, B 3.2, pp. 165-169
[abstract]

C. Imawan, F. Solzbacher, H. Steffes, E. Obermeier
Improvement of gas sensing properties of MoO3 thin films using Ti - Overlayers for the application in NH3 gas sensors
Transducers '99 - 10th International Conference on Solid-State Sensors & Actuators, Sendai, Japan, June 7-10 Digest of Technical Papers,1999, pp. 1686 - 1689
[abstract]

S. Zappe, E. Obermeier, H. Möller, G. Krötz, E. Bonnotte,Y. Barriol, J.L. Decorps
Piezoresistive pressure sensor based on 3C-SiC-ON-SOI for high temperature and high pressure applications
Transducers '99 - 10th International Conference on Solid-State Sensors & Actuators, Sendai, Japan, June 7-10 Digest of Technical Papers,1999, pp. 346 - 349
[abstract]

F. Solzbacher, C. Imawan, H. Steffes, E. Obermeier
A new low power SiC / HfB2 - based microhotplate with integrated IDC for metal oxide gassensors
Transducers '99 - 10th International Conference on Solid-State Sensors & Actuators, Sendai, Japan, June 7-10 Digest of Technical Papers,1999, pp. 1032 - 1035
[abstract]
H. Steffes, C. Imawan, F. Solzbacher, E. Obermeier
Reactively RF-Sputtered In2O3 Thin Films for the Detection of NO2
Eurosensors XIII, The Hague, The Netherlands, September 12-15, 1999,
Proceedings, pp. 871 - 874
[abstract]
C. Imawan, F. Solzbacher, H. Steffes, E. Obermeier
Modified NiO thin films using Ti-overlayers for H2 sensing
Eurosensors XIII, The Hague, The Netherlands, September 12-15, 1999,
Proceedings, pp. 137 - 140
[abstract]
H. Schröder, E. Obermeier, A. Steckenborn
Micropyramidal hillocks on KOH etched {100} silicon surfaces:
Formation, prevention and removal

J. Micromech. Microeng., Vol. 9, 1999, pp. 139 - 145
[abstract]
V. Laible, P.M. Hagelin, O. Solgaard, E. Obermeier
Static and Dynamic Characterization of Polysilicon Surface-Micromachined Actuators
SPIE - Micromachined Devices and Components V, Santa Clara (Ca), USA, 1999
SPIE Vol. 3876, pp. 162 - 170
[abstract]
H. Schröder, E. Obermeier
The mechanism of Si{100} convex corner undercutting in anisotropic KOH etching
MME ’99, Micromechanics Europe 1999, 10th Workshop on Micromachining,
Micromechanics and Microsystems, Gif-sur-Yvette, France, 1999
Technical Digest, pp. 172 - 175
[abstract]
Th. Velten, D. Stefan, E. Obermeier
Micro Coil With Movable Core For The Application In An Inductive Displacement Sensor
J. Micromech. Microeng., Vol. 9, 1999, UK, pp. 119 - 122
[abstract]
Th. Velten, P. Krause, E. Jansen, E. Obermeier
A New Three-Axis Accelerometer
Sensor '99 - 9th Int'l Traide Fair and Conference for Sensors / Transducers & Systems, Nürnberg, Germany, May 18-20, 1999.
Sensor '99 Proceedings II, 1999, A 5.2, pp. 47-52
[abstract]
A. Hein, S. Finkbeiner, H. Muenzel, J. Marek, E. Obermeier
The Effects of Thermal Treatment of CZ- and FZ-Silicon on Crystal Defect Formation and the Etching Behavior During Anisotropic Etching in KOH-Solutions
Transducers '99 - 10th International Conference on Solid-State Sensors & Actuators, Sendai, Japan, June 7-10, Digest of Technical Papers,1999, pp. 1090 - 1093
[abstract]
A. Hein, S. Finkbeiner, J. Marek, E. Obermeier
Material related effects on wet chemical micromachining of smart MEMS devices
SPIE - Micromachined Devices and Components V, Santa Clara (Ca), USA, 1999
SPIE Vol. 3876, pp. 29 - 36
[abstract]
R. Ziermann, J. von Berg, E. Obermeier, F. Wischmeyer, E. Niemann, H. Möller
High Temperature Piezoresistive ß-SiC-on-SOI Pressure Sensor with on Chip SiC Thermistor
Material Science and Engineering, B 61-62, 1999, pp. 576 - 578
[abstract]
S. Zappe, E. Obermeier, J. Stoemenos, H. Möller, G. Krötz, H. Wirth,W. Skorupa
Stabilization of the 3C-SiC/SOI system by an intermediate silicon nitride layer
Material Science and Engineering, B 61-62, 1999, pp. 522 - 525
[abstract]