Research Academics  
 
   
 
1998
 

H. Schröder, E. Obermeier
A new model to explain the morphology of anisotropically etched {100} silicon
structures in pure KOH

Workshop on physical chemistry of wet chemical etching of silicon,
May 17 - 19, 1998, Holten, The Netherlands, Technical Digest, pp. 31-32
[abstract]

H. Schröder, E. Obermeier, A. Steckenborn
Formation, prevention and removal of micropyramids on KOH etched (100) silicon
Proceedings of the MME ’98, Bergen, Norway, June 3-5, pp. 28 - 31
[abstract]

Th. Velten, F.G. Hofmann, Th. Noll, E. Obermeier, G. Hommel, R. Posner
Application of Micro Sensors in Gesture Recognition
Proceedings of the MME ’98, Bergen, Norway, June 3-5, pp. 131 - 134
[abstract]

S. Zappe, E. Obermeier, S. T. Sheppard, U. Schmid, V. Lauer, W. Wondrak
Advanced SPICE-modelling of 6H-SiC-JFETs including substrate effects
HITEC' 98, Albuquerque, USA 14. - 18. Juni, 1998, pp. 261 - 264
[abstract]
Th. Velten, D. Stefan, E. Obermeier
Micro Coil With Movable Core For The Application In An Inductive Displacement Sensor
Proceedings of the MME ’98, Bergen, Norway, June 3-5, pp. 214 - 215
[abstract]
J. von Berg, R. Ziermann, W. Reichert, E. Obermeier, M. Eickhoff1, G. Krötz1
Measurement of the Cylinder Pressure in Combustion Engines with a Piezoresistive
ß-SiC-on-SOI Pressure Sensor

Proceedings of the HITEC ´98, Albuquerque, NM, USA, June 14-18, 1998, pp. 245 - 249
[abstract]
J. von Berg, R. Ziermann, W. Reichert, E. Obermeier, M. Eickhoff, G. Krötz, U. Thoma, Th. Boltshauser, C. Cavalloni, J.P. Nendza
High Temperature Piezoresistive ß-SiC-on-SOI Pressure Sensor for Combustion Engines
Materials Science Forum Vols. 264 - 268 (1998), pp. 1101 - 1104
[abstract]
E. Jansen, E. Obermeier, G. Krötz, Ch. Wagner
Measurement of the Thermal conductivity of Thin ß-SiC Films between 80 K and 600 K
Materials Science Forum Vols. 264 - 268 (1998), pp. 631 - 634
[abstract]
H. Schröder, E. Obermeier, A. Steckenborn
Effects of the etchmask properties on the anisotropy etching of [100] silcon in aqueous KOH
J. Micromech. Microeng. 8 (1998), pp. 99 - 103
[abstract]
H.R. Tränkler, E. Obermeier (Hrsg.)
Sensortechnik - Handbuch für Praxis und Wissenschaft
Springerverlag 1998
J. von Berg, E. Obermeier, E. Stenzel, R. Voss
FE-Simulation einer mikromechanischen elektrostatisch angetriebenen Cylindrical Shell Struktur für die Anwendung als Drehratensensor
CAD-FEM Users' Meeting, Bad Neuenahr - Ahrweiler, Germany, 1998, pp. 1 - 17
[abstract]
R. Ziermann, J. von Berg, E. Obermeier, E. Niemann, H. Möller, M. Eickhoff, G. Krötz
High Temperature Piezoresistive ß-SiC-on-SOI Pressure Sensor with on Chip SiC Thermistor
ECSCRM '98, Montpellier, France, 01. - 04. Sept. 1998
[abstract]
S. Zappe, E. Obermeier, J. Stoemenos, H. Möller, G. Krötz, H. Wirth, W. Skorupa
Stabilization of the 3C-SiC/SOI System by an Intermediate Silcon Nitride Layer
ECSCRM '98, Montpellier, France, 01. - 04. Sept. 1998,
Conf. Proc. pp. 87-88
[abstract]
Th. Velten, P. Krause, D. Stefan, E. Obermeier, F.G. Hofmann, G. Hommel
Micro Sensors for the Application in Gesture Recognition
MST '98, Potsdam, Germany, Proc. 98, pp. 127 - 132
[abstract]
Th. Velten, P. Krause, E. Obermeier
Micromachined inductive displacement sensor
SPIE '98, Santa Clara, USA, SPIE Proc. 1998, pp. 331 - 338
[abstract]
A. Hein, G. Findler, S. Finkbeiner, H. Muenzel, E. Obermeier
The Effects of Impurities in Silicon Lattice on Anisotropic Etching in KOH-Solutions
MST '98, Potsdam, Germany, Proc. 98, pp. 409 - 415
[abstract]