Research Academics  
 
   
 
1997
 

R. Lossy, W. Reichert, E. Obermeier and W. Skorupa
Doping of 3C-SiC by Implantation of Nitrogen at High Temperatures
J.Electronic Materials, Vol.26(3) 123-127(1997)
[abstract]

S. Zappe, R. Ziermann, E. Obermeier
Hybrid Silicon Carbide (SiC) Amplifiers for High Temperature Applications
published at: Sensor 97, 13. - 15. Mai 1997
[abstract]

S. Zappe, M. Leone, F. Yang, E. Obermeier
Characterisation of siliconcarbide JFETs with respect to microsystems for high temperature applications
Microsytem Technologies 3(3), May 1997, pp 134 - 138
[abstract]

 
R. Ziermann, J. von Berg, W. Reichert, E. Obermeier
A High Temperature Pressure Sensor Width ß-SiC-Piezoresistors on SOI-Substrates
Transducers 97, Chicago, Illinois, USA, 1997, Digest of Technical Papers, 1411 - 1414
[abstract]
M. Baltzer, Th. Kraus, E. Obermeier
A Linear Stepping Actuator in Surface Micromachining Technology for Low Voltages and Large Displacements
Transducers 97, Chicago, Illinois, USA, 1997, Digest of Technical Papers, 781 - 784
[abstract]
Th. Kraus, M. Baltzer, E. Obermeier
A Micro Shutter for Applications to Optical and Thermal Detectors
Transducers 97, Chicago, Illinois, USA, June 16 - 19, 1997, Digest of Technical Papers, 67 - 70
Th. Velten, C. Y. He, E. Obermeier
Dynamic Behavior Of A New Two-Axis Accelerometer
Transducers 97, Chicago, Illinois, USA, 1997, Digest of Technical Papers, 1217 - 1220
[abstract]
A. Hein, O. Dorsch, E. Obermeier
Effects of metallic impurities on anisotropic etching of silicon in aqueous KOH-solutions
Transducers 97, Chicago, Illinois, USA, 1997, Digest of Technical Papers, 687 - 690
[abstract]
O. Dorsch, A. Hein, E. Obermeier
Effect of the Silicon Content of Aqueous KOH on the Etching Behaviour of Convex Corners in <100> Single Crystalline Silicon
Transducers 97, Chicago, Illinois, USA, 1997, Digest of Technical Papers, 683 - 686
[abstract]
W. Reichert, D. Stefan, E. Obermeier, and W. Wondrak
Fabrication of Smooth 3C-SiC Surfaces by Reactive Ion Etching Using a Graphite Electrode
Materials Science and Engineering B46 (1997) 190 - 194
[abstract]
R. Lossy, W. Reichert, and E. Obermeier
Characterization of 3C-SiC Doped by Nitrogen Implantation
Materials Science and Engineering B46 (1997) 156 - 159
[abstract]
J.M. Bluet, S. Contreras Azema, J. Camassel, J.L. Robert, L. Di Cioccio, W. Reichert, R. Lossy, E. Obermeier and J. Stoemenos
Comparison of the Electrical and Optical Properties of 3C-SiC on SOI from Different Origin
Materials Science and Engineering B46 (1997) 152 - 155
[abstract]
W. Reichert, E. Obermeier, and J. Stoemenos
3C-SIC Films on SOI Substrates for High Temperature Applications
Diamond and Related Materials 6, 1448 - 1450 (1997)
[abstract]
W. Reichert, R. Lossy, M. González Sirgo, E. Obermeier, and W. Skorupa
Investigation of the Effects of High Temperature Implantation and Post Implantation Annealing on the Electrical Behaviour of Nitrogen Implanted 3C-SiC Films
Diamond and Related Materials 6, 1445 - 1447 (1997)
[abstract]
Th. Diepold, E. Obermeier, A. Berchtold
A Micromachined Continuous Ink Jet Print Head for High Resolution Printing
Technical Digest MME’97 Southampton, p. 176-179
[abstract]
H. Schröder, E. Obermeier, A. Steckenborn
Effects of the Etchmask Properties on the Anisotropy Ratio in Anisotropic Etching of {100} Silicon in Aqueous KOH
Technical Digest MME’97 Southampton, p. 79 - 82
[abstract]
J. von Berg, R. Ziermann, W. Reichert, E. Obermeier, M. Eickhoff, G. Krötz, U. Thoma, Th. Boltshauser, C. Cavalloni, and J.P. Nendza
High Temperature Piezoresistive ß-SiC-on-SOI Pressure Sensor for Combustion Engines
Proc. Int. Conf. on Silicon Carbide, III - nitrides and Related Materials - 1997 (ICSCIII - N'97), Stockholm, Sweden, p. 520 (1997)
[abstract]