Research Academics  
 
   
 
1996
 

E. Jansen, E. Obermeier
Measurements of the Thermal Conductivity of CVD-Diamond Films using Micromechanical Devices
Phys. Stat. Sol. (a) 154, pp. 395-402, 1996
[abstract]

E. Jansen, E. Obermeier
Thermal Conductivity Measurements on Thin Films Based on Micromechanical Devices
Journal of Micromechanics and Microengineering, Vol. 6, Nr 1, pp. 118 - 121, 1996
[abstract]

T. Diepold, E. Obermeier
Smoothing of Ultrasonically Drilled Holes in Borosilicate Glass by Wet Chemical Etching
Journal of Micromechanics and Microengineering, Vol. 6, Nr 1, pp. 29 - 32, 1996
[abstract]

 
J. von Berg, W. Reichert, E. Obermeier, Ch. Wagner, G. Krötz, and E. Niemann
Dependence of the Elastic Properties of Thin 3C-SiC Films on Their Crystallinity and the Deposition Conditions
Transactions of the Third International High Temperature Electronics Conference, Volume 2, Albuquerque, New Mexico, USA, June 9-14, 1996, p 51 - p 57
[abstract]
 
W. Reichert, M. González Sirgo, J. von Berg, and E. Obermeier
Investigation of the Piezoresistive Effect in High Temperature Implanted and In Situ Doped 3C-SiC Films
Transactions of the Third International High Temperature Electronics Conference, Volume 2, Albuquerque, New Mexico, USA, June 9-14, 1996, p 137 - p 142
[abstract]
 
S. Zappe, M. Baltzer, Th. Kraus, E. Obermeier
Electrostatically Driven Linear Micro-Actuators: FE-Analysis and Fabrication
Technical Digest MME '96, Micromechanics Europe, 21.-22. October 1996, Barcelona, Spain (accepted for publication)
[abstract]
 
Th. Velten, P. Krause, E. Obermeier
Two-Axis Micromachined Accelerometer for Gesture Recognition
Technical Digest MME '96, Micromechanics Europe, 21.-22. October 1996, Barcelona, Spain (accepted for publication)
[abstract]
 

S. Zappe, M. Leone, F. Yang, E. Obermeier
Characterisation of Silicon Carbide JFETs with Respect to Microsystems for High Temperature Applications
Technical Digest MICROSYSTEM Technologies 96, 17.-19. Semptember, Potsdam, Germany, 1996, pp 67 - 72
[abstract]

 
R. Lossy, W. Reichert, E. Obermeier and J. Stoemenos
High temperature implantation of Beta-SiC and its characterization
Silicon Carbide and Related Materials, Inst. Phys. Conf. Ser. No 142, 553 - 556, 1996
[abstract]
 
W. Reichert, R. Lossy, J.M. Gonzalez Sirgo, E. Obermeier, and J. Stoemenos
Beta-SiC deposited on SIMOX substrates: characterization of the SiC/SOI system at elevated temperatures
Silicon Carbide and Related Materials, Inst. Phys. Conf. Ser. No 142, 129 - 132, 1996
[abstract]
 
Th. Diepold, E. Obermeier
Bulk Micromachining of Borosilicate Glass by Ultrasonic Drilling and Sand Blasting
Technical Digest MICROSYSTEM Technologies 96, 17.-19. Semptember, Potsdam, Germany, 1996, pp 211 - 216
[abstract]
 
K. Hilgendorf, P. Krause, E. Obermeier
Reduction of the Influence of the Anodic Bonding Process on the Behaviour of Pressure Sensors by Using New Glass Substrates
Technical Digest MICROSYSTEM Technologies 96, 17.-19. Semptember, Potsdam, Germany, 1996, pp 331 - 336
[abstract]
 
O. Dorsch, E. Obermeier
Investigation of the Etching of Single Crystalline Silicon Depending on the Silicon Concentration of the Aqueous KOH Etch Solution
Technical Digest MICROSYSTEM Technologies 96, 17.-19. Semptember, Potsdam, Germany, 1996, pp 487 - 492
[abstract]
 
M. Baltzer, Th. Kraus, E. Obermeier
A New Type of a Linear Actuator in Surface Micromachining Technology
Technical Digest MICROSYSTEM Technologies 96, 17.-19. Semptember, Potsdam, Germany, 1996, pp 591 - 596
[abstract]
 
Th. Kraus, M. Baltzer, E. Obermeier
Design and Fabrication of Enlarged Surface Micromachined Micromotors for Applications in the Millimeter Range
Technical Digest MICROSYSTEM Technologies 96, 17.-19. Semptember, Potsdam, Germany, 1996, pp 603 - 608
[abstract]
 
H. Schröder, O. Dorsch, E. Obermeier
An Improved Method to Align Etchmasks to the <110> Crystal Orientation
Technical Digest MICROSYSTEM Technologies 96, 17.-19. Semptember, Potsdam, Germany, 1996, pp 651 - 655
[abstract]
 
D Maier Schneidert, A Köprülülü, S Ballhausen Holm and E Obermeier
Elastic properties and microstructure of LPCVD polysilicon films
J. Micromech. Microeng. 6 (1996) 436-46
[abstract]
 
D. Mutschall, S. A. Berger, A. Scherz, E. Obermeier
Reactive sputtering and catalytical modification of NiO for gas sensing applications
Proc. of the 6th int. meeting on chemical sensors, Gaithersburg, Md., July 22-25, 1996, p. 28
[abstract]
 
D. Mutschall, E. Obermeier
Gas sensing properties of molybdenum oxide thin films
Proc. of the 6th int. meeting on chemical sensors, Gaithersburg, Md., July 22-25, 1996, p. 29
[abstract]