Research Academics  
 
   
 
1994
 

C. Scheibe, E. Obermeier, W. Maunz, C. Plog,
Design und Realisierung einer direkt beheizten Gassensor-Basisstruktur für Temperturen
bis 450 °C

ITG-Fachbericht,126, ISBN 3-8007-1988-6, VDE-Verlag GmbH, Berlin Offenbach, 1994

 
V. Schlichting, R. Lossy, N. Graf, E. Obermeier
Automatischer Abgleichalgorithmus für integrierte CMOS- Drucksensoren mit on-chip Programmierung
ITG-Fachbericht,126, ISBN 3-8007-1988-6, VDE-Verlag GmbH, Berlin Offenbach, 1994, pp. 121-126
 
J. Lin, V.Schlichting, E. Obermeier
Elektrostatisch aktivierter Mikrochopper für Strahlungsdetektoren
ITG-Fachbericht,126, ISBN 3-8007-1988-6, VDE-Verlag GmbH, Berlin Offenbach, 1994, pp. 115-121
 
J. Fricke, E. Obermeier
Mikrobeam-Beschleunigungssensor in Oberflächen-Mikromechanik
ITG-Fachbericht,126, ISBN 3-8007-1988-6, VDE-Verlag GmbH, Berlin Offenbach, 1994,pp. 501-506
 
K. Zipperer, E. Obermeier
Optimierung von Rayleigh-und Lambwellen-Mikroresonatoren als Basiselemente für Chememosensoren
ITG-Fachbericht,126, ISBN 3-8007-1988-6, VDE-Verlag GmbH, Berlin Offenbach, 1994, pp. 459-465
 
S. Hein, E. Obermeier
Piezoresistiver Silicium-Niederdrucksensor mit oberflächenstrukturierter Membran
ITG-Fachbericht,126, ISBN 3-8007-1988-6, VDE-Verlag GmbH, Berlin Offenbach, 1994, pp. 297-304
 
K. Zipperer, C. Scheibe, E. Obermeier
Optimization of Rayleigh and Lamb Wave Microresonators as Basic Devices for Chemical Sensors
Technical Digest, The 5th International Meeting on Chemical Sensors, Rom / Italien, 1994, pp. 723-727
 

J. Lin, S. Möller, E. Obermeier
SC-signal processing circuitry for capacitive chemical microsensors
The 5th International Meeting on Chemical Sensors, Rom / Italien, 1994,pp. 1179-1182

 
J. Lin, E. Obermeier
Finite element modeling of dielectric chemical sensors based on 2D and 3D interdigital capacitors The 5th International Meeting on Chemical Sensors, Rom / Italien, 1994, pp. 727-731
 
C. Scheibe, E. Obermeier, TU-Berlin, W. Maunz, C. Plog, Dornier GmbH
Development of a High-Temperature Basic device for Chemical Sensors Based on an IDC with On-Chip Heating
Technical Digest, The 5th International Meeting on Chemical Sensors, Rom / Italien, 1994, pp. 744-747
 
D. Mutschall, E. Obermeier
A capacitiv CO2 Sensor with on chip heater
The 5th International Meeting on Chemical Sensors, Rom / Italien, 1994, pp. 526-529
 
S. Möller, J.Lin, E. Obermeier
Material and Design considerations on low power micoheater modules for gas sensor applications
The 5th International Meeting on Chemical Sensors, Rom / Italien, 1994, pp. 433-436
 
C. Plog, W. Maunz, P. Kurzweil, E. Obermeier, C. Scheibe
Combustion Gas Sensitivity of Zeolite Layers on Thin Film Capacitors
Technical Digest, The 5th International Meeting on Chemical Sensors, Rom/ Italien, 1994, pp. 516-519
 
D. Maier-Schneider, J. Maibach, E. Obermeier
Variations in Young’s Modulus and Intrinsic Stress of LPCVD-Polysilicon due to High Temperature Annealing,
Workshop Digest, Micro Mechanics Europe 94, Pisa / Italien, 1994, pp. 65-68
 
C. Scheibe, E. Obermeier
Compensating Corner Undercutting in Anisotropic Etching of (100) Silicon for Chip Seperation, Workshop Digest, Micro Mechanics Europe 94, Pisa / Italien, 1994, pp. 52-55
 
P. Krause, E.Obermeier,
Etch Rate and Surface Roughness of Deep Narrow U-Grooves in (110)-Oriented Silicon, Workshop Digest, Micro Mechanics Europe 94, Pisa / Italien, 1994, pp. 56-59
 
E. Obermeier,
Microsensors: Devices of Continuously Increasing Significance for Industrial Applications, Technical Digest of the 12th Sensor Symposium, 1994, pp. 1-8