Research Academics  
 
   
 
1993
 

D. Hammerschmidt, F.V. Schnatz, W. Brockherde, B.J. Hostika, E. Obermeier
A CMOS Piezoresistive Pressure Sensor with On-Chip Programmable Readout and Calibration Electronics;
IEEE ISSCC' 93, Digest of Technical Papers; San Francisco, U.S.A.; 1993

 
J. Fricke, E. Obermeier
Cantilever Beam Accelerometer Based on Surface Micromachining Technology;
MME '93, Micro Mechanics Europe, Technical Digest; Neuchâtel, Switzerland; 1993
 
J. Lin, E. Obermeier
Capacitive Thin Film Gas Sensors with Signal Processing System for Determination of SO2; Sensors and Actuators B15/16; 1993
 
J. Lin, M. Heurich, V. Schlichting, E. Obermeier
Characterisation and Optimisation of a CO2-Sensitive Organically Modified Silicate with respect to its Use as a Gas Sensor;
Sensors and Actuators B13/14; 1993
 
M. Werner, O. Dorsch, H.U. Baerwind, E. Obermeier, L. Haase, W. Seifert, A. Ringhandt, C. Johnston, S. Romani, H. Bishop, P.R. Chalker
Charge transport in heavily B-doped polycrystalline diamond films;
Appl. Phys. 64(5); 1993
 
E. Obermeier, J. Lin, V. Schlichting
Design and Fabrication of an Electrostatically Driven Micro-Shutter;
Int. Conf. on Solid-State Sensors and Actuators (Transducers '93), Technical Digest; Yokohama, Japan; 1993
 
E. Obermeier, M. Werner, O. Dorsch
Diamond and Silicon Carbide Sensors;
CEC Brite/Euram Programme (Contract BREU-0058, Proposal BE P-3404, Final Technical Report); 1993
 

V. Schlichting, G. Pollak-Diener, E. Obermeier, D. Hammerschmidt, F.V. Schnatz, B. J. Hosicka
Digital Programable Pressure Sensor with On-Chip CMOS Signal Processing and Data Storage; Int. Conf. on Solid-State Sensors and Actuators (Transducers '93), Technical Digest; Yokohama, Japan; 1993

 
M. Werner, S. Hein, E. Obermeier
Elastic properties of thin polycrystalline diamond films;
Diamond and Related Materials, 2; 939-942; 1993
 
J. Lin, E. Obermeier, V. Schlichting
Elektrostatisch aktive Mikroblende;
ITG-Fachtagung 126 Mikroelektronik Heft 5; 1993
 
M. Werner
High Temperature Sensors;
HITEN, 1st European Conference on High Temperature Electronics; ; Madrid, Spain; 1993
 
F.L. Dickert, G.K. Zwissler, E. Obermeier
Liquid Crystals on Intedigital Structures - Applications as Capacitive Chemical Sensors;
Bericht der Bunsengesellschaft Phys. Chem. 97 No. 2; 1993
 
J. Lin, M. Heurich, E. Obermeier
Manufacture and Examination of Various Spin-on Glass Films with respect to their Humidity-Sensitive Properties;
Sensor and Actuators B 13/14; 528-529; 1993
 
G. Pollak-Diener, J. Lin, E. Obermeier
Micromachined Gas Sensor Using the Dependence of Heat Conductivity on Gas Concentration;
Int. Conf. on Solid-State Sensors and Actuators (Transducers '93), Technical Digest; Yokohama, Japan; 1993
 
M. Werner, K. Holzner, O. Dorsch, E. Obermeier, R. E. Harper, C. Johnston, P. R. Chalker, I. M. Buckley-Golder
Piezoresistive effect of boron doped diamond thin films;
Diamond and Related Materials, 2; 1096-1099; 1993
 
S. Hein, V. Schlichting, E. Obermeier
Piezoresistive Silicon Sensor for Very Low Pressures Based on the Concept of Stress Concentration;
Int. Conf. on Solid-State Sensors and Actuators (Transducers '93), Technical Digest; Yokohama, Japan; 1993
 
E. Obermeier, V. Schlichting, D. Hammerschmidt, F.V. Schnatz, B.J. Hostika
Smart Pressure Sensor with on-chip Calibration and Compensation Capability; (1993);
Proc. Conf. and Exposition of Sensors and Systems, Sensors Expo '93; 104-106; Philadelphia, U.S.A.; 1993
 
M. Werner, E. Obermeier, R. E. Harper, C. Johnston, P. R. Chalker, I. M. Buckley-Golder
Space-Charge-Limited Current Flow and Trap Density in Undoped Diamond Films;
Diamond and Related Materials, 2; 825-828; 1993
 
F.L. Dickert, Th. Bruckdorfer, H. Feigl, A. Haunschild, V. Kuschow, E. Obermeier, W.-E. Bulst, U. Knauer, G.Mages
Supramolecular detection of solvent vapours with QMB and SAW devices;
Sensors and Actuators B, 13-14; 297-391; 1993
 
M. Werner, O. Dorsch, H.U. Baerwind, A. Ersoy, E. Obermeier, C. Johnston, P.R. Chalker, V. Moore, I.M. Buckley-Golder
Very Low Resistivity AL/Si Ohmic Contacts to Boron Doped Polycrystalline Diamond Films; Proc. 4th Europ. Conf. on Diamond, Diamond-like and Related Materials; Albufeira, Algarve, Portugal; 1993