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Welcome to MAT - Solutions in Microsystems !

The Microsensor & Actuator Technology Center (MAT) at TU Berlin is one of the leading Deep Silicon Etching research and development centers in the field of micro electromechanical systems (MEMS).


In cooperation with research and industrial partners, we develop, prototype and characterize micro sensors and actuators for various applications, such as automotive systems, automation and production technology, medical applications, high temperature and harsh environment tasks.

Microsensor & Actuator Technology Center
Gustav-Meyer-Allee 25
13355 Berlin, Germany

Phone:             +49 -30 -314-72 772
Fax:                   +49 -30 -314-72 660