Research Academics  
 
   

 

Welcome to MAT - Solutions in Microsystems !

The Microsensor & Actuator Technology Center (MAT) at TU Berlin is one of the leading research and development Deep Silicon Etchingcenters in the field of micro electromechanical systems (MEMS).

 

In cooperation with research and industrial partners, we develop, prototype and characterize micro sensors and actuators for various applications, such as automotive systems, automation and production technology, medical applications, high temperature and harsh environment tasks.


 

News

09.10.2009

Classes for the WS-09/10 are now online in the academics section. [ Check them out ]

06.07.09

Anmeldung für Prüfungen (MST I, Aktuatorik, Sensorik) bei Frau Ewald.


01.01.09

New papers added in our publications section. [Link]

Microsensor & Actuator Technology Center
Gustav-Meyer-Allee 25
13355 Berlin, Germany

Phone:             +49 -30 -314-72 829
Fax:                   +49 -30 -314-72 660
Internet:    www-mat.ee.tu-berlin.de