Research Academics  
 
   

 

Welcome to MAT - Solutions in Microsystems !

The Microsensor & Actuator Technology Center (MAT) at TU Berlin is one of the leading research and development Deep Silicon Etchingcenters in the field of micro electromechanical systems (MEMS).

 

In cooperation with research and industrial partners, we develop, prototype and characterize micro sensors and actuators for various applications, such as automotive systems, automation and production technology, medical applications, high temperature and harsh environment tasks.


 

News

30.07.2012

Abschied Herr Prof. Dr.-Ing. Ernst Obermeier [Link]

24.10.2011

Ph.D. Willyanto Kurniawan 24. October 2011 [Link]

14.10.2011

Classes for the WiSe 2011 are now online in the academics section. [Link]

08.04.2011

Foschungsschwerpunkt at Hannover Messe. [Link]

07.04.2011

New papers added in our publications section. [Link]

06.04.2011

Classes for the SS-2011 are now online in the academics section. [ Check them out ]

25.02.2011

Anmeldung für Prüfungen  bei Frau Plöger.

Microsensor & Actuator Technology Center
Gustav-Meyer-Allee 25
13355 Berlin, Germany

Phone:             +49 -30 -314-72 772
Fax:                   +49 -30 -314-72 660
Internet:    www-mat.ee.tu-berlin.de